Niobium target

Niobium sputtering targets， Niobium disc Material: RO4200-1， RO4210-2 Size: circular targets:　 Diameter　 10mm up to 400mm x Thickness 2mm up to 28mm rectangular targets: Thickness 1mm up to 20.32mm x Width up to 800mm x Length up to 3000mm Purity:　 >=99.9％　 or　 99.95％ 　

 

Table 1: technology　 parameter

Recrystallization	95％min
Grain size	ASTM 4 or finer
Surface finish	16Rms max. or Ra 0.4 ( RMS64 or better)
Flatness	0.1mm or 0.15％ max
Tolerance	+/-0.010" on all dimensions